JPH0479650B2 - - Google Patents
Info
- Publication number
- JPH0479650B2 JPH0479650B2 JP59066493A JP6649384A JPH0479650B2 JP H0479650 B2 JPH0479650 B2 JP H0479650B2 JP 59066493 A JP59066493 A JP 59066493A JP 6649384 A JP6649384 A JP 6649384A JP H0479650 B2 JPH0479650 B2 JP H0479650B2
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- semiconductor
- pressure
- sensitive
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 42
- 230000005669 field effect Effects 0.000 claims description 28
- 239000000126 substance Substances 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 16
- 239000002131 composite material Substances 0.000 claims description 15
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 42
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- 229910004298 SiO 2 Inorganic materials 0.000 description 9
- 238000009792 diffusion process Methods 0.000 description 9
- 239000012528 membrane Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 150000002500 ions Chemical class 0.000 description 8
- 239000013078 crystal Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 239000008280 blood Substances 0.000 description 4
- 210000004369 blood Anatomy 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 229910001414 potassium ion Inorganic materials 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 229930182555 Penicillin Natural products 0.000 description 2
- JGSARLDLIJGVTE-MBNYWOFBSA-N Penicillin G Chemical compound N([C@H]1[C@H]2SC([C@@H](N2C1=O)C(O)=O)(C)C)C(=O)CC1=CC=CC=C1 JGSARLDLIJGVTE-MBNYWOFBSA-N 0.000 description 2
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 2
- OIPILFWXSMYKGL-UHFFFAOYSA-N acetylcholine Chemical compound CC(=O)OCC[N+](C)(C)C OIPILFWXSMYKGL-UHFFFAOYSA-N 0.000 description 2
- 229960004373 acetylcholine Drugs 0.000 description 2
- 230000036772 blood pressure Effects 0.000 description 2
- 239000004202 carbamide Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000005685 electric field effect Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229940049954 penicillin Drugs 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- -1 polyethylene Polymers 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 102000012440 Acetylcholinesterase Human genes 0.000 description 1
- 108010022752 Acetylcholinesterase Proteins 0.000 description 1
- 229910017105 AlOxNy Inorganic materials 0.000 description 1
- 238000012935 Averaging Methods 0.000 description 1
- 102000004882 Lipase Human genes 0.000 description 1
- 108090001060 Lipase Proteins 0.000 description 1
- 239000004367 Lipase Substances 0.000 description 1
- 108010087702 Penicillinase Proteins 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910020286 SiOxNy Inorganic materials 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 108010046334 Urease Proteins 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 229940022698 acetylcholinesterase Drugs 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910001413 alkali metal ion Inorganic materials 0.000 description 1
- 229910000323 aluminium silicate Inorganic materials 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 210000004204 blood vessel Anatomy 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 150000003983 crown ethers Chemical class 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000012623 in vivo measurement Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 235000019421 lipase Nutrition 0.000 description 1
- 150000002632 lipids Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 229950009506 penicillinase Drugs 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 230000009291 secondary effect Effects 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- 229940045136 urea Drugs 0.000 description 1
Landscapes
- Measuring And Recording Apparatus For Diagnosis (AREA)
- Measuring Fluid Pressure (AREA)
- Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59066493A JPS60210243A (ja) | 1984-04-02 | 1984-04-02 | 半導体複合センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59066493A JPS60210243A (ja) | 1984-04-02 | 1984-04-02 | 半導体複合センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60210243A JPS60210243A (ja) | 1985-10-22 |
| JPH0479650B2 true JPH0479650B2 (en]) | 1992-12-16 |
Family
ID=13317383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59066493A Granted JPS60210243A (ja) | 1984-04-02 | 1984-04-02 | 半導体複合センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60210243A (en]) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6175752B1 (en) | 1998-04-30 | 2001-01-16 | Therasense, Inc. | Analyte monitoring device and methods of use |
| US8346337B2 (en) | 1998-04-30 | 2013-01-01 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US8480580B2 (en) | 1998-04-30 | 2013-07-09 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US8688188B2 (en) | 1998-04-30 | 2014-04-01 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US8465425B2 (en) | 1998-04-30 | 2013-06-18 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US9066695B2 (en) | 1998-04-30 | 2015-06-30 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US8974386B2 (en) | 1998-04-30 | 2015-03-10 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US6560471B1 (en) | 2001-01-02 | 2003-05-06 | Therasense, Inc. | Analyte monitoring device and methods of use |
| WO2004061420A2 (en) | 2002-12-31 | 2004-07-22 | Therasense, Inc. | Continuous glucose monitoring system and methods of use |
| EP1718198A4 (en) | 2004-02-17 | 2008-06-04 | Therasense Inc | METHOD AND SYSTEM FOR PROVIDING DATA COMMUNICATION IN A CONTINUOUS BLOOD SUGAR MONITORING AND MANAGEMENT SYSTEM |
| US7766829B2 (en) | 2005-11-04 | 2010-08-03 | Abbott Diabetes Care Inc. | Method and system for providing basal profile modification in analyte monitoring and management systems |
| US7620438B2 (en) | 2006-03-31 | 2009-11-17 | Abbott Diabetes Care Inc. | Method and system for powering an electronic device |
| US8226891B2 (en) | 2006-03-31 | 2012-07-24 | Abbott Diabetes Care Inc. | Analyte monitoring devices and methods therefor |
| US8123686B2 (en) | 2007-03-01 | 2012-02-28 | Abbott Diabetes Care Inc. | Method and apparatus for providing rolling data in communication systems |
-
1984
- 1984-04-02 JP JP59066493A patent/JPS60210243A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60210243A (ja) | 1985-10-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4874499A (en) | Electrochemical microsensors and method of making such sensors | |
| Samaun et al. | An IC piezoresistive pressure sensor for biomedical instrumentation | |
| JPH0479650B2 (en]) | ||
| US4218298A (en) | Selective chemical sensitive FET transducer | |
| KR840002283B1 (ko) | 실리콘 압력 변환기 | |
| US4508613A (en) | Miniaturized potassium ion sensor | |
| US3918019A (en) | Miniature absolute pressure transducer assembly and method | |
| JPS5921495B2 (ja) | 細管型圧力計 | |
| JPS6313356B2 (en]) | ||
| JP2002531822A (ja) | 圧力センサ | |
| US5039390A (en) | Chemically sensitive transducer | |
| KR910001842B1 (ko) | 반도체압력센서의 브리지회로 조정방법 | |
| US8525279B2 (en) | Single element three terminal piezoresistive pressure sensor | |
| US4881056A (en) | Facedown-type semiconductor pressure sensor with spacer | |
| JPH0469338B2 (en]) | ||
| JPS6114563A (ja) | 半導体複合センサ | |
| JPS62145780A (ja) | 半導体圧力センサ | |
| JPH04225B2 (en]) | ||
| JP2813721B2 (ja) | 容量型圧力センサ | |
| JPS61120958A (ja) | ガラス応答膜を有するイオンセンサ | |
| JPS62132160A (ja) | 分離ゲ−ト型ｉｓｆｅｔを用いたバイオセンサ− | |
| JPH0584070B2 (en]) | ||
| JPS6097676A (ja) | 半導体圧力センサ及びその製造方法 | |
| JPH0422293Y2 (en]) | ||
| JPS60202347A (ja) | 電界効果型半導体センサ |